3D Optical Profilometer Head (Standard model) VR-6100

Model

VR-6100

Type

Head

Controller

VR-6000

Field of view

Low magnification (wide field of view)

Magnification on a 15" monitor 12×

Horizontal

24.0 mm

Vertical

18.0 mm

Magnification on a 15" monitor 25×

Horizontal

12.0 mm

Vertical

9.0 mm

Magnification on a 15" monitor 38×

Horizontal

8.0 mm

Vertical

6.0 mm

Magnification on a 15" monitor 50×

Horizontal

Vertical

4.5 mm

High magnification (high resolution)

Magnification on a 15" monitor 40×

Horizontal

7.6 mm

Vertical

5.7 mm

Magnification on a 15" monitor 80×

Horizontal

3.8 mm

Vertical

2.9 mm

Magnification on a 15" monitor 120×

Horizontal

2.5 mm

Vertical

1.9 mm

Magnification on a 15" monitor 160×

Horizontal

Vertical

1.4 mm

Zoom

1× to 4×

Height measurement

Display resolution

0.1 μm

Height measurement range

Without Z stitching

Low magnification (wide field of view): 10 mm
High magnification (high resolution): 1 mm

With Z stitching

Low magnification (wide field of view): 50 mm
High magnification (high resolution): 30 mm

Repeatability (σ)

Without Z stitching

0.4 μm ^*1

With Z stitching

1.0 μm ^*1

Measurement accuracy

Without Z stitching

±2.5 μm ^*1

With Z stitching

±4.0 μm ^*1

Width measurement

Repeatability (σ)

Low magnification (wide field of view): 1 μm
High magnification (high resolution): 0.5 μm
^*1

Measurement accuracy

Low magnification (wide field of view): ±5 μm
High magnification (high resolution): ±2 μm
^*1

Stitching function

Manual measurement (XY manual operation + Z automatic control) ^*2

Stitching function

Motorised rotational unit

Not supported

XY measurable range

92 × 86 mm ^*2

Stage

XY stroke

70 × 70 mm (manual)

Z stroke

69 mm (motorised)

Load capacity

4.5 kg

Working distance

75 mm

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double-telecentric lens × 2

Receiver lens

Double-telecentric lens

Light sources

Observation light source

LED ring light (red, blue, green)

Measurement light source

White LED

Data processing

Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)

Power supply

Power voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

200 VA max.

Environmental resistance

Ambient temperature

+15 to 30°C

Relative humidity

20 to 80% RH (no condensation)

Weight

Approx. 25 kg ^*3