3D Optical Profilometer
VR-6000 series
3D Optical Profilometer Controller VR-6000
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | VR-6000 | |||
Type | Controller | |||
Head | VR-6200, VR-6100 | |||
Field of view | Low magnification (wide field of view) | Magnification on a 15" monitor 12× | Horizontal | 24.0 mm |
Vertical | 18.0 mm | |||
Magnification on a 15" monitor 25× | Horizontal | 12.0 mm | ||
Vertical | 9.0 mm | |||
Magnification on a 15" monitor 38× | Horizontal | 8.0 mm | ||
Vertical | 6.0 mm | |||
Magnification on a 15" monitor 50× | Horizontal | |||
Vertical | 4.5 mm | |||
High magnification (high resolution) | Magnification on a 15" monitor 40× | Horizontal | 7.6 mm | |
Vertical | 5.7 mm | |||
Magnification on a 15" monitor 80× | Horizontal | 3.8 mm | ||
Vertical | 2.9 mm | |||
Magnification on a 15" monitor 120× | Horizontal | 2.5 mm | ||
Vertical | 1.9 mm | |||
Magnification on a 15" monitor 160× | Horizontal | |||
Vertical | 1.4 mm | |||
Zoom | 1× to 4× | |||
Height measurement | Display resolution | 0.1 μm | ||
Height measurement range | Without Z stitching | Low magnification (wide field of view): 10 mm | ||
With Z stitching | Low magnification (wide field of view): 50 mm | |||
Repeatability (σ) | Without Z stitching | 0.4 μm *1 | ||
With Z stitching | 1.0 μm *1 | |||
Measurement accuracy | Without Z stitching | ±2.5 μm *1 | ||
With Z stitching | ±4.0 μm *1 | |||
Width measurement | Repeatability (σ) | Low magnification (wide field of view): 1 μm | ||
Measurement accuracy | Low magnification (wide field of view): ±5 μm | |||
Stitching function | VR-6200: Fully-automated measurement (XY automatic control + Z automatic control, θ automatic control), Automatic mapping creation, Automatic area setting *2 | |||
Stitching function | Motorised rotational unit | VR-6200: Supported *2 | ||
XY measurable range | VR-6200: 300 × 150 mm *2 | |||
Stage | XY stroke | VR-6200: 278 × 134 mm (motorised) | ||
Z stroke | 69 mm (motorised) | |||
Load capacity | 4.5 kg | |||
Working distance | 75 mm | |||
Image receiving element | 4 megapixel monochrome CMOS | |||
Transmitter lens | Double-telecentric lens × 2 | |||
Receiver lens | Double-telecentric lens | |||
Light sources | Observation light source | LED ring light (red, blue, green) | ||
Measurement light source | White LED | |||
Data processing | Dedicated PC specified by KEYENCE (OS: Windows 10 Pro) | |||
Power supply | Power voltage | 100 to 240 VAC ±10%, 50/60 Hz | ||
Power consumption | 200 VA max. | |||
Environmental resistance | Ambient temperature | +15 to 30°C | ||
Relative humidity | 20 to 80% RH (no condensation) | |||
Weight | Approx. 4 kg | |||
*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1°C) |