Image Dimension Measurement System

IM-7000 series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Measurement Head IM-7030

IM-7030 - Measurement Head

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

  • CE Marking
  • CSA

Specifications

Model

IM-7030

Type

Head
Wide stage model incorporating programmable ring-illumination/light probe unit

Image sensor

1” 6.6 mega pixel monochrome CMOS

Display

10. 4” LCD monitor (XGA: 1024 × 768)

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode: 300 mm × 200 mm (4× R50)
High-precision measurement mode: 225 × 125 mm

Minimum display unit

0.1 µm

Repeatability

W/o stage movement

Wide-field measurement mode: ±1 µm
High-precision measurement mode: ±0.5 µm

With stage movement

Wide-field measurement mode: ±2 µm
High-precision measurement mode: ±1.5 µm

Measurement accuracy (±2σ)

W/o binding

Wide-field measurement mode: ±5 µm*1
High-precision measurement mode: ±2 µm*2

With binding

Wide-field measurement mode: ±(7 + 0.02 L) µm*3
High-precision measurement mode: ± (4 + 0.02 L) µm*4

Light probe Measurement

Measurable area (XY)

190 × 90 mm

Maximum measurement depth

30 mm

Light probe diameter

ø3 mm

Measuring force

0.015 N

Repeatability

±2 µm*5

Measurement accuracy

±(8 + 0.02 L) µm*6

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 3.1

4 ports (rear: 4)

USB 2.0 series A

2 ports (front: 2)

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMos output
Rated load 24 VDC 0.5 A
ON resistance 50 mΩ or lower

Record

Hard disk drive

500 GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

Four division, multi-angle illumination (electric)
Slit ring (directivity) illumination (electric)

XY stage

Moving range

200 × 100 mm (electric)

Withstand load

7.5 kg

Z stage

Moving range

75 mm (electric)

Power supply

Power voltage

100–240 VAC, 50/60 Hz

Current consumption

430 VA or lower

Environmental resistance

Ambient temperature

+10°C to 35°C

Relative humidity

20% RH to 80% RH (no condensation)

Weight

Approx. 33 kg

*1 In the range of ø80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
*2 In the range of ø20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
*3 In the range of 280 × 180 mm (4× R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
*4 In the range of 220 × 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units)
*5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm
*6 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 3 kg or less. If the detection system is at a deep position,then ±(10 + 0.02 L) µm with L as the measurement length in mm.

Data Sheet (PDF) Other Models